Author: Meraa Arab
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Simulation of Deposition Processes with PECVD Apparatus
Juergen GeiserCurrent price €102.34Original price €114.99This book discusses the study of simulating the growth of a thin film by chemical vapour deposition (CVD) processes. In recent years, due to the re...
View full detailsCurrent price €102.34Original price €114.99Save 11%
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