Adhesion Aspects in MEMS/NEMS

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Adhesion Aspects
Adhesion Force
advanced adhesion mitigation strategies
AFM
AFM Experiment
AFM Tip
angle
area
Asperity Contact
Atomic Scale Roughness
capillary
Capillary Force
Category=PN
Category=PNR
condensation
contact
Contact Angle
Contact Radius
Contact Resistance
continuum mechanics analysis
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force
GCMC Simulation
Hamaker Constant
interface characterisation
microelectromechanical
molecular dynamics simulation
monolayer
nanostructured material surfaces
NEMS
PDMS
PDMS Film
PDMS Surface
RF Mem Switch
Roughness Exponent
self-assembled
Superhydrophobic Surface
surface force modelling
systems
Tip Surface Distance
tribology in microsystems
UHMWPE Sample
UHMWPE Surface
Van Der Waals
Van Der Waals Forces

Product details

  • ISBN 9780367445942
  • Weight: 780g
  • Dimensions: 170 x 245mm
  • Publication Date: 09 Dec 2019
  • Publisher: Taylor & Francis Ltd
  • Publication City/Country: GB
  • Product Form: Paperback
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Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface forces.

The book is divided into five parts as follows: Part 1: Understanding Through Continuum Theory; Part 2: Computer Simulation of Interfaces; Part 3: Adhesion and Friction Measurements; Part 4: Adhesion in Practical Applications; and

Part 5: Adhesion Mitigation Strategies.

This compilation constitutes the first book on this extremely important topic in the burgeoning field of MEMS/NEMS. It is obvious from the topics covered in this book that bountiful information is contained here covering understanding of surface forces and adhesion as well as novel ways to mitigate adhesion in MEMS/NEMS.

This book should be of great interest to anyone engaged in the wonderful and fascinating field of MEMS/NEMS, as it captures the current R&D activity.

Kim, Seong H.; Dugger, Michael T.; Mittal, Kash L.