Database Needs for Modeling and Simulation of Plasma Processing
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A01=Commission on Physical Sciences
A01=Division on Engineering and Physical Sciences
A01=National Research Council
A01=Panel on Database Needs in Plasma Processing
and Applications
Author_Commission on Physical Sciences
Author_Division on Engineering and Physical Sciences
Author_National Research Council
Author_Panel on Database Needs in Plasma Processing
Category=PHFP
eq_bestseller
eq_isMigrated=1
eq_isMigrated=2
eq_nobargain
eq_non-fiction
eq_science
Mathematics
Product details
- ISBN 9780309055918
- Dimensions: 216 x 279mm
- Publication Date: 21 Oct 1996
- Publisher: National Academies Press
- Publication City/Country: US
- Product Form: Paperback
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In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation. Plasma process control is rudimentary. Optimization of plasma reactor operation, including adjustments to deal with increasingly stringent controls on plant emissions, is performed predominantly by trial and error. There is now a strong and growing economic incentive to improve on the traditional methods of plasma reactor and process design, optimization, and control. An obvious strategy for both chip manufacturers and plasma equipment suppliers is to employ large-scale modeling and simulation. The major roadblock to further development of this promising strategy is the lack of a database for the many physical and chemical processes that occur in the plasma. The data that are currently available are often scattered throughout the scientific literature, and assessments of their reliability are usually unavailable. Database Needs for Modeling and Simulation of Plasma Processing identifies strategies to add data to the existing database, to improve access to the database, and to assess the reliability of the available data.
In addition to identifying the most important needs, this report assesses the experimental and theoretical/computational techniques that can be used, or must be developed, in order to begin to satisfy these needs.
Panel on Database Needs in Plasma Processing, National Research Council
