Surfaces, Interfaces, and Films for Microelectronics
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A01=Eugene A. Irene
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Author_Eugene A. Irene
Category=TJ
electronic
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field
function
growing
guide
important
important analytical
independentstudy
introduction
materials
microelectronic
microelectronic applications
new
processes
rapidly
reference
scientists
surface
vital
Product details
- ISBN 9780470174470
- Weight: 885g
- Dimensions: 163 x 241mm
- Publication Date: 11 Mar 2008
- Publisher: John Wiley & Sons Inc
- Publication City/Country: US
- Product Form: Hardback
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The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students.
Eugene A. Irene, PhD, is Professor of Chemistry at the University of North Carolina, Chapel Hill.?Prior to that appointment, he worked in the Thomas J. Watson Research Center at IBM for ten years. Professor Irene has written more than 250 journal publications and is the author of various books, including Electronic Materials Science (Wiley). He is coeditor of Handbook of Ellipsometry and numerous scientific reviews and book chapters.
