Micro-Nano Technology XIV

Volume is indexed by Thomson Reuters CPCI-S (WoS).
The collection of 276 peer reviewed papers covers various high-tech fields including electronics, machinery, materials, manufacturing, testing, and disciplines of physical, chemical and biological.
The papers are grouped as follows:
Chapter 1: Micro and Nano Fabrication;
Chapter 2: Micro Sensors;
Chapter 3: Micro Actuators;
Chapter 4: Microfluidics and Nanofluidics;
Chapter 5: Bio MEMS and Applications;
Chapter 6: Nanomaterials;
Chapter 7: Optical MEMS (MOEMS);
Chapter 8: Power MEMS;
Chapter 9: Nano Devices and NEMS;
Chapter 10: Nanobiology, Nano-Bioinformatics, Nanomedicine;
Chapter 11: Packaging, Sealing and Assembling Technologies;
Chapter 12: MEMS/Nano Related Research.