Micro-Nano Technology XV

Collection of selected, peer reviewed papers from the 15th Annual conference and 4th International Conference of the Chinese Society of Micro-Nano Technology (CSMNT 2013), November 3-6, 2013, Tianjin, China.
Volume is indexed by Thomson Reuters CPCI-S (WoS).
The 260 papers are grouped as follows:
Chapter 1: Micro/Nano Materials, Technologies and Application,
Chapter 2: Micro/Nanofluids Research and Technologies,
Chapter 3: Micro/Nano Research, Design and Fabrication,
Chapter 4: Measurements, Sensors and MEMS,
Chapter 5: Micro Actuators and Devices,
Chapter 6: Optical Research,
Chapter 7: Energy and Power Research and Technologies,
Chapter 8: Bioresearch and Bioinformatics,
Chapter 9: MEMS/Nano Applied Research