Micro-Nano Technology XVI

Collection of selected, peer reviewed papers from the 16th Annual Conference and 5th International Conference of the Chinese Society of Micro-Nano Technology (CSMNT 2014), August 31-September 3, 2014, Chengdu, China.
The 226 papers are grouped as follows:
Chapter 1: Materials and Technologies in the Scale of Micro and Nano;
Chapter 2: Micro/Nanofluids Research and Technologies;
Chapter 3: Measurements, Sensors and MEMS;
Chapter 4: Micro Actuators and Devices;
Chapter 5: Optics in the Scale of Micro and Nano;
Chapter 6: Energy Harvesting, Power Supply and Technologies for Fuel Cells;
Chapter 7: Bioresearch and Biomedical Engineering