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A01=Hongbo Lan
A01=Hongzhong Liu
A01=Yucheng Ding
Age Group_Uncategorized
Age Group_Uncategorized
Author_Hongbo Lan
Author_Hongzhong Liu
Author_Yucheng Ding
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Category1=Non-Fiction
Category=TBN
COP=United States
Delivery_Delivery within 10-20 working days
Language_English
PA=Not available (reason unspecified)
Price_€50 to €100
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Nanoimprint Lithography: Principles, Processes & Materials

English

By (author): Hongbo Lan Hongzhong Liu Yucheng Ding

Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nanofabrication technologies and manufacturing of Integrated Circuits (IC). Traditional optical lithography including contact and project photolithography has contributed significantly to the semiconductor device advancements. Currently, maintaining the rapid pace of half-pitch reduction requires overcoming the challenge of improving and extending the incumbent optical projection lithography technology while simultaneously developing alternative, next generation lithography (NGL) technologies to be used when optical projection lithography is no longer more economical than the alternatives. Furthermore, NIL is also one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures as this highly technical book will give new insight to. See more
Current price €62.69
Original price €65.99
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A01=Hongbo LanA01=Hongzhong LiuA01=Yucheng DingAge Group_UncategorizedAuthor_Hongbo LanAuthor_Hongzhong LiuAuthor_Yucheng Dingautomatic-updateCategory1=Non-FictionCategory=TBNCOP=United StatesDelivery_Delivery within 10-20 working daysLanguage_EnglishPA=Not available (reason unspecified)Price_€50 to €100PS=Activesoftlaunch
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Product Details
  • Weight: 148g
  • Dimensions: 230 x 155mm
  • Publication Date: 23 Aug 2011
  • Publisher: Nova Science Publishers Inc
  • Publication City/Country: United States
  • Language: English
  • ISBN13: 9781611225013
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